Kuyang'ana kukhwima kwa pamwamba, kutalika kwa masitepe ndi makulidwe a filimu yopyapyala pa ma wafer a semiconductor, magalasi olondola a kuwala ndi zinthu zophimbidwa kumatsimikizira mwachindunji kuchuluka kwa kupanga. Kusanthula kwachikhalidwe kwa contact probe kumakanda mosavuta zitsanzo zofewa, pomwe zida wamba zoyezera kuwala sizingapereke kulondola kwa nano-level. Kodi mungakwaniritse bwanji mayeso osawononga, kulondola kwa nano-high kwambiri komanso kuwunika kwa kupanga zinthu zambiri nthawi imodzi?
Cholumikizira magetsi chatsopano cha Wavelength OE cha mafakitale chili ndi njira ziwiri zoyezera ma interferometry. Ndi kuzindikira kosakhudzana ndi kukhudzana, chimaphimba ntchito yonse kuyambira kafukufuku ndi chitukuko cha labotale mpaka QC yopanga pa intaneti.
Njira Zolumikizirana Pakati pa Ma Core Awiri pa Malo Onse Ozungulira
Mosiyana ndi zipangizo zoyezera za single-mode, dongosololi limaphatikiza ma VSI (Vertical Scanning Interferometry) ndi ma PSI (Phase-Shifting Interferometry), zomwe zimakwaniritsa zofunikira ziwiri zazikulu zoyezera ndi makina amodzi.
| Chinthu Choyerekeza | VSI / CSI | PSI |
|---|---|---|
| Malo Ofunika Kwambiri | Malo ouma, masitepe, malo osasunthika komanso ovuta | Malo osalala kwambiri, osalekeza komanso owoneka bwino pagalasi |
| Kuyeza Kutalika Koyima | Zosiyanasiyana; zimatha kuyeza mipata yozama komanso masitepe okwera | Malo opapatiza; si oyenera masitepe akuluakulu okhaokha |
| Kutsimikiza Koyima | Mulingo wa nanometer; sub-nanometer yomwe ingatheke pogwiritsa ntchito ma algorithms okonzedwa bwino | Kutha kubwerezabwereza mpaka kufika pamlingo wa sub-nanometer ngakhale sub-angstrom |
| Kupirira Kuuma kwa Pamwamba | Pamwamba | Zochepa |
| Kusamveka bwino kwa Gawo | Pafupifupi palibe; mtengo wokwanira wa zotuluka ulipo | Kulakwitsa kwa kukulunga kwa gawo la 2π |
| Kuthamanga kwa Kuyeza | Imafuna kusanthula kwa axial, pang'onopang'ono | Nthawi zambiri mwachangu |
| Kukaniza Kugwedezeka | Zimatha kugwedezeka mukayang'ana | Kusuntha kwa magawo ambiri, komwe kumakhala kosavuta kugwedezeka |
| Mapulogalamu Odziwika | Kukhwima, kutalika kwa masitepe, kapangidwe kake kakang'ono, malo opangidwa ndi makina | Kuyesa kosalala kwambiri kwa nkhope, mawonekedwe a nkhope ndi kusalala |
PSI (Phase-Shifting Interferometry): Yopangidwa mwapadera ndi mawonekedwe ang'onoang'ono a kutalika ndi mafilimu owonda kwambiri, omwe amapereka mawonekedwe abwino kwambiri a microscopic.
Galasi la Ndege
Galasi Lopindika (Galasi Lozungulira)
Chitsanzo cha Kapangidwe ka Photolithographic
VSI Vertical Scanning Interferometry: Yokonzedwa bwino kuti igwiritsidwe ntchito ndi zinthu zazitali komanso zazitali; pali miyeso yonse yoyezera popanda kusanthula m'magawo.
Ma micro bump array ozungulira pa ma wafers apamwamba opakidwa
Elliptical micro bump array pa ma wafers apamwamba opakidwa
gulu la ma microlens
Pogwirizana ndi gwero la kuwala koyera la 450–700 nm logwirizana pang'ono, limatha kuletsa kuwala kosochera kuchokera ku kuwala kosiyanasiyana ndipo limapereka mphamvu yolimbana ndi kusokoneza. Lili ndi zokutira zambiri, gawo lowala ili lokhala ndi kuwala kochepa limatha kutulutsa zizindikiro zosokoneza zokhazikika komanso zosiyana, zomwe zimapangitsa kuti muyeso ukhale wolondola komanso wodalirika.
2. Mafotokozedwe Otsogola a Nano-Grade, Deta Yosamalirika & Yokhazikika Yanthawi Yaitali
-Dongosololi limagwiritsa ntchito kuwala koyera kwa LED komwe kumayendera pakati pa mafunde a 550 nm, komwe kali ndi magawo apamwamba kwambiri ogwirira ntchito mogwirizana ndi miyezo yapamwamba yapadziko lonse lapansi.
-Kulondola koyima: <1 nm, cholakwika chobwerezabwereza muyeso: <10 nm, kulondola kwenikweni kwa nanometer
-Kuyeza koyima kwambiri: 500 μm, palibe kusintha kobwerezabwereza komwe kumafunika pazipinda zazing'ono zapamwamba.
-Liwiro la kusanthula: 100 μm/s, kusanthula konse kumalizidwa mkati mwa masekondi 10, kulinganiza kulondola ndi kuwunikira.
-Mogwirizana ndi miyezo ya NIST yotsatirika, njira yolumikizira yokha yomangidwa mkati imatsimikizira kuti deta yonse yotsatirika imachitika nthawi zonse, ikukwaniritsa miyezo yokhwima ya QC ya mafakitale a semiconductor ndi optical.
| Chinthu | Chizindikiro |
| Kuyeza Mphamvu | Malo owoneka bwino a 3D pamwamba, kukhwima kwa pamwamba, kutalika kwa masitepe ndi makulidwe a filimu ya zinthu zowunikira ndi zinthu zowunikira |
| Njira Yopezera Deta | Vertical Scanning Interferometry (VSI) + Phase-Shifting Interferometry (PSI) |
| Dongosolo Loyezera | NIST yodziwika bwino yotsatirika + njira yodziwira yokha |
| Magawo Oyezera Oyimirira | 500 μm |
| Malo Owonera | 20× cholinga: 0.87 × 0.65 mm |
| Kamera Ikugwira Ntchito | Kuchuluka Kwambiri: 2048×2448; Chiŵerengero cha Chimango: 74 Fps; Kuzama kwa Chingwe: 12 bit |
| Liwiro Lojambulira | 100 μm/s (Njira Yolondola) |
| Zosankha za Lens Yoyenera | Zolinga zokulitsa 20x / 50x zomwe zingakonzedwe |
| Kapangidwe ka Kukhazikitsa | Pulatifomu yodzipatula yogwira ntchito yogwedezeka, yokhazikika komanso yoyimirira ikupezeka |
| Kukula Konse (L×W×H) | 120 × 80 × 65 masentimita |
| Kalemeredwe kake konse | ≤58 kg |
3. Kapangidwe ka Kabati Kogwirizana ndi Mafakitale, Kogwirizana ndi Lab & Line Yopangira
Yokonzedwa bwino kuti igwiritsidwe ntchito m'ma workshop opanga zinthu zambiri komanso m'ma lab ofufuza zasayansi omwe ali ndi njira yosinthira yokhazikitsira.
Pulatifomu yodzipatula yogwira ntchito yodzipatula: Muyeso wokhazikika pansi pa kugwedezeka kwa fakitale, palibe tebulo lowonjezera lodzipatula lofunikira.
Kapangidwe kake kawiri: Kukhazikitsa kolunjika kapena koyima, kuphatikiza kosavuta ndi mizere yopanga yokha ndi malo ogwirira ntchito a labu.
Thupi laling'ono lokhala ndi zonse mu chimodzi: Malo ocheperako okhala ndi kukula kwa 120 × 80 × 65 cm, kulemera ≤58 kg, kuyika kosavuta pamalopo.
Dongosolo lonseli limaphatikiza gwero la kuwala, gawo lalikulu la interferometer ndi gawo lowongolera. Pulagi ndi kusewera mukamaliza kumasula, palibe kusintha kovuta kwa njira yowunikira komwe kumafunika.
Kufunika Kwambiri kwa Ntchito Yopanga Zinthu Molondola Kwambiri
Makampani Opanga Ma Semiconductor: Kuyang'ana kwa 3D topography & step height ya ma silicon wafers ndi ma micro-nano chips.
Precision Optics: Kuyesa kwa makulidwe a filimu ndi makulidwe a magalasi owonera, zolinga ndi zinthu zowala.
Zophimba Zatsopano Zogwira Ntchito: Kusanthula kwa mawonekedwe a pamwamba ndi makulidwe a zophimba zowunikira & mafilimu opyapyala ogwira ntchito.
Ma Lab Ofufuza za Sayansi: Kuyesa kwa kapangidwe ka micro-nano ndi mawonekedwe a zinthu molondola.
Ndi zaka zambiri zaukadaulo mu kafukufuku ndi chitukuko cha kuwala, Wavelength OE imapanga njira zonse zoyezera kuwala koyera komanso ma algorithms oyesera a ma interferometer oyera. Kuwongolera kwathunthu kwaukadaulo kuyambira magwero a kuwala, magalasi olunjika mpaka makina oyezera. Chida chilichonse chimayesedwa molondola kwambiri chisanaperekedwe. Timapereka chithandizo chaukadaulo chokwanira pambuyo pogulitsa ndikusintha njira zapadera zoyezera kutengera kukula kwa ntchito ya makasitomala komanso zofunikira pa mzere wopanga wokha.
Nthawi yotumizira: Julayi-15-2026